| 摘要 |
PURPOSE:To produce high-purity AlF3 continuously, by reacting a vaporized AlBr3 gas with a fluorine gas in a gaseous phase. CONSTITUTION:A bromine gas supported on a carrier gas is fed to an AlBr3- forming container 1 packed with a Al powder 4 between quartz filters 3 of an enlarged diameter part 2, an AlBr3 gas is formed by heating the container 1 by an electric furnace 5 and the formed AlBr3 gas is introduced through a feed pipe 6 to a reaction zone 9 in a reactor 7. Simultaneously a fluorine gas supported on the carrier gas is sent from a junction part 8 to the reaction zone 9, the reaction zone 9 is kept at 100-900 deg.C by the electric furnace 10, both the gases are reacted in a gaseous phase to form AlF3 and coagulated AlF3 is collected through a cyclone 11 and a dust collector 12. Consequently, AlF3 having contents of Fe, Cu, Ni, Co and Cr of <= detection limit (10 ppb) by activation analysis method and 0.02-30mum average particle diameter is obtained.
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