| 摘要 |
PURPOSE:To decrease the coercive force of a soft magnetic layer and to obtain a vertical magnetic recording medium having excellent recording sensitivity by impressing a negative bias voltage to a substrate and executing sputtering to form the soft magnetic layer. CONSTITUTION:The soft magnetic layer of this recording medium is formed by impressing the negative bias voltage to the substrate and executing sputtering. For example, an aluminum disk 7 subjected to an alumite treatment on the surface is used as the substrate and MoCu-'Permalloy(R)' is used as a target. The soft magnetic layer, in this case, the 'Permalloy(R)' layer 8, is formed to 0.5mum by a sputtering method at 15 deg.C substrate temp., 3mTorr gaseous argon pressure, 300W input power and 60V voltage impressed to the substrate. The vertical magnetized layer is further formed thereon to about 0.3mum thickness by the sputtering method using Co-Cr as a target at 90 deg.C substrate temp., 1mTorr gaseous argon pressure and 300W input power.
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