| 摘要 |
PURPOSE:To obtain a high sensitive sensor which has the stable quality and can set a wide measuring load range by using a sensitive member which is formed by laminating and joining an amorphous alloy layer having an excellent magnetostrictive characteristic to an elastic metal layer. CONSTITUTION:The sensitive member 1 is formed by laminating a thin-walled elastic metal plate such as stainless steel, brass and phosphorus bronze and a thin-walled plate of an amorphous alloy having the magnetostrictive characteristic and joining these integrally. A laminated plate obtained in this way is, for instance, cut rectangularly and formed to the sensitive member 1 in a plate- spring shape. Then, a load joining member 3 such as a plate shape where a bolt through hole, etc., to joining the load are provided is provided fixing on one end of the sensitive member 1 by a fixing means such as a rivet and further, base material 2 connected with a case of a sensor, etc., is fixed on the other end of the sensitive member 1 by the fixing means such as the rivet, etc. In this way, the sensitive member having elasticity in accordance with the desired load range can be easily made and the quality and performance of the sensor can be stabilized.
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