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发明名称
摘要
申请公布号
JPS62147346(U)
申请公布日期
1987.09.17
申请号
JP19860035709U
申请日期
1986.03.11
申请人
发明人
分类号
H01L21/66;G01R1/073;G01R31/26;(IPC1-7):H01L21/66
主分类号
H01L21/66
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代理人
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