发明名称 Method of controlling forward voltage across Schottky diode
摘要 During the deposition of a metallic layer on an N-type semiconductive region to form a Schottky diode in a structure placed in a highly evacuated chamber, at least one selected gas is introduced into the chamber to control the forward voltage across the diode.
申请公布号 US4692991(A) 申请公布日期 1987.09.15
申请号 US19850757038 申请日期 1985.07.19
申请人 SIGNETICS CORPORATION 发明人 FLOWERS, RONALD C.
分类号 H01L29/872;H01L21/285;H01L29/47;(IPC1-7):H01L29/48 主分类号 H01L29/872
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