发明名称 |
Liquid composition for forming a coating film of organopolysiloxane and method for the preparation thereof |
摘要 |
The invention provides a novel means for providing a highly heat-resistant and corrosion-resistant coating film on the surface of a substrate such as a semiconductor silicon wafer or glass plate by coating the surface with a liquid coating composition which is a solution of an oligomeric organopolysiloxane as a partial dehydration-condensation product of a monohydrocarbylsilane triol RSi(OH)3, optionally, with admixture of a dihydrocarbylsilane diol R2Si(OH)2, R being a monovalent hydrocarbon group, e.g. methyl or phenyl, in an organic solvent followed by baking of the coated substrate to convert the coating layer into a cured resin film.
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申请公布号 |
US4694040(A) |
申请公布日期 |
1987.09.15 |
申请号 |
US19860902029 |
申请日期 |
1986.08.25 |
申请人 |
TOKYO DENSHI KAGAKU KABUSHIKI KAISHA |
发明人 |
HASHIMOTO, AKIRA;NISHIMURA, TOSHIHIRO;NAKAYAMA, MUNEO;NAKANE, HISASHI;TODA, SHOZO |
分类号 |
C08G77/00;C08G77/06;C09D183/04;C09D183/14;(IPC1-7):C08K5/05 |
主分类号 |
C08G77/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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