| 摘要 |
PURPOSE:To increase a conversion gain of current-air pressure conversion element, by making open/close control to a pressure lead nozzle to which the supplied air pressure is lead, and the pressure lead nozzle communicated to the atomasphere by means of a plate-shape piezoelectric element. CONSTITUTION:A nozzle 50 to which the supplied air pressure Ps is led and a nozzle 47 communicated to the atomasphere are separately provided opposite to each other in a sealed chamber 43, and the movable end 61A of a bimorph type piezoelectric element 61 supported in a cantilever form is disposed between these nozzles. With this arrangement, when the voltage is applied to the bimorph type piezoelectric element 61, the movable end 61A makes open/close control to the nozzles 47, 50 respectively, so that it is possible to optinally change Po led out of the sealed chamber 43 and to also exceedingly increase the electricity-air pressure gain.
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