| 摘要 |
PURPOSE:To simplify the mechanism of a measuring apparatus by detecting a remote visual field image by one image pickup operation of an image pickup device, by detecting the light projected from a semiconductor device by the image pickup device through an attenuation filter. CONSTITUTION:A plurality of laser diode elements 1 are arranged on the mount stand of a photosemiconductor device in one bar like row and laser beam is emitted from the plane of cleavage of each element 1. At each time when the optical measurement of the elements is finished, the mount stand 3 is moved by one arrangement pitch. An attenuation filter 4 is arranged in front of the elements and a half mirror 5 is arranged in front of the filter 4. A pair of laser beam attenuated by the filter is applied to an image pickup device 6 from the half mirror 5 and the reflected beam from the half mirror 5 is applied to a photodiode 7 for measuring current and optical output characteristics. Then, remove visual field image is picked up by the device 6 through the contact of the probe P of a measuring device with the elements 1 and the mechanism of the measuring apparatus is made simple.
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