发明名称 |
PRODUCTION OF THIN METALLIC FILM |
摘要 |
PURPOSE:To form a wrinkeless thin metallic film on a polymer substrate by heating the substrate to a temp. close to the temp. of a cylindrical can with a preheating roll before the substrate is brought into contact with the can so as to prevent the thermal deformation of the substrate. CONSTITUTION:A preheating roll 3 is heated to a temp. close to the temp. of cylindrical can 2. A polymer substrate 1 is heated by traveling along the roll 3 and the heated substrate 1 is traveled along the peripheral surface of the heated cylindrical can 2. A thin metallic film is formed on the substrate 1 on the can 2 by vacuum deposition.
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申请公布号 |
JPS62207867(A) |
申请公布日期 |
1987.09.12 |
申请号 |
JP19860048885 |
申请日期 |
1986.03.06 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TOMA KIYOKAZU;SUGITA RYUJI;HONDA KAZUYOSHI;NANBU TARO |
分类号 |
C23C14/02;C23C14/56;H01F41/18 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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