| 摘要 |
PURPOSE:To facilitate the formation of a superconducting thin film by irradiating a Be or Be group alloy thin film with ion beams or neutral particle rays and making the Be or Be group alloy thin film into amorphous and/or fine- crystal one. CONSTITUTION:Be or Be group alloy 14 is heated to be evaporated in a vacuum and a surface of an oppositely arranged substrate 17 is coated with the Be with film. Also, the Be thin film on a surface of the substrate is irradiated with ion beams or neutral particle rays 22 to make the Be or Be group alloy thin film into amorphous and/or fine-crystal one. The ion beams or neutral particle rays irradiating the Be thin film on the substrate surface are Be or an inert O-element, or a mixture of said element and an element C, N, O etc. The Be group alloy thin film consists of an alloy of Be and a O-element or at elast one of Li, B, C, N, O, Si, Al, and Au, Thus, a superconducting thin film can be formed easily. |
