| 摘要 |
PURPOSE:To produce the ink nozzle plate of an ink-jet recording head by forming the protrusion of an annular member on both surfaces of photosensitive glass by utilizing a mask, photosensitization by UV rays, and dissolution by an aq. hydrofluoric acid, soln., covering the one side excluding the inside of the protrusion with a blocking agent, exposing the glass, and dissolving the glass with the aq. hydrofluoric acid soln. CONSTITUTION:The photosensitive glass 15 is covered with a mask having an annular part, UV rays are irradiated, then the photosensitized part is dissolved by an aq. hydrofluoric acid soln. and removed, and annular protrusions 16 and 17 consisting of a part 22 which has not been exposed and dissolved by the aq. hydrofluoric acid soln. are formed. A hydrofluoric acid-resistant electron wax 13 and a glass substrate 14 are mounted on the lower surface, and soft silicone rubber 11 coated with a blocking agent 12 is placed on the upper surface. After the silicone rubber 11 is released and the blocking agent 12 is stuck on the annular protrusion 16, a hydrofluoric acid- resistant electron wax 18 is masked to prevent the receding of the protrusion 16 into the inside, and an ink nozzle plate having a nozzle hole resulting from the annular protrusion is produced by irradiation of UV rays and etching by the aq. hydrofluoric acid soln. |
