| 摘要 |
PURPOSE:To obtain high-quality ultrafine particles with high efficiency by inclining an electrode relative to a base material, generating magnetic blow in an arc, providing a suction hole in the blown direction, cooling the formed metallic vapor and capturing the same as the ultrafine particles. CONSTITUTION:The tungsten electrode 2 is inclined by about 30-60 deg. to the opposite side to the suction hole 4 and the arc 19 is generated in an atmosphere of He, etc., having a high thermal pinch effect by using an arc power source 6 having substantially high load voltage, for example, about 80V dropping characteristic. The base material 5 is melted and evaporated by the energy thereof to form the ultrafine particles. An unbalance of electromagnetic force is generated by the inclination of the electrode 2, by which the ultrafine particles formed by the magnetic blow effect are migrated to the suction hole 4. The ultrafine particles are passed through a cooler 10 and are carried by a circulating gas to a capturing chamber 11, where the ultrafine particles are captured by a filter. The circulating gas is returned by a circulation pump 16 to the generating chamber 1. Since the fresh metallic surface is thereby repeatedly exposed on the base material 5, the ultrafine particles are formed with the high efficiency.
|
