| 摘要 |
PURPOSE:To form a magnetic recording medium having a vertically magnetized film which possesses large vertical magnetic anisotropy by incorporating a specific ratio of nitrogen into a Co alloy film. CONSTITUTION:The ratio of the nitrogen to be incorporated into the Co alloy film which is a magnetic film of the magnetic recording medium is specified to a 0.001-5atm(atomic)% range. The Co alloy film is preferable as the magnetic film of the magnetic recording medium and is exemplified by Co-Cr, Co-Re, Co-Cr-Nb, etc. A nitridable gas to be introduced in the formation of the Co alloy film contg. nitrogen is preferably a gas such as nitrogen or ammonia or gaseous mixture composed thereof and the nitridable gas diluted with an inert gas such as argon or active gas such as hydrogen is usable. The pressure of the nitridable gas in the stage of forming the Co alloy film is specified to 10<-7>-10<-4>Torr. The magnetic film having the large vertical magnetic anisotropy is thus formed with good reproducibility.
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