| 摘要 |
PURPOSE:To prevent rupture of a bimorph element by forming a coating film consisting of an organic substance in a section from a fixed end to a free end. CONSTITUTION:For example, a plate of piezoelectric ceramics of 50mmX10 mmX0.15mm as a piezoelectric plate is used and a phosphorus bronze plate of 0.05mm thickness is used as an intermediate metallic plate. A coating film consisting of an adhesive 21 is formed on a bimorph element 10 bonded by use of an epoxy adhesive. By using an adhesive having a constant elastivity even when it is solidified, for example, a rubber adhesive, deterioration of displacement quantity generating power is about 3% even if the thickness of coating is about 0.5mm. As a result, rupture of the bimorph element can be prevented.
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