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发明名称
摘要
申请公布号
JPS62145261(U)
申请公布日期
1987.09.12
申请号
JP19860033303U
申请日期
1986.03.10
申请人
发明人
分类号
G01N23/225;H01J37/20;H01J37/252;H01J37/28;(IPC1-7):H01J37/20
主分类号
G01N23/225
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