发明名称 VACUUM DEVICE
摘要 PURPOSE:To realize the efficiency and the labor saving of the sample measurement work, by composing the system to open and close the light passage of a photocoupler with a fin through the up and down movement of a detecting plate. CONSTITUTION:When a sample 6 is moved up and down, a detecting plate 13, to which the upper side of the loaded sample 10 contacts, moves up and down with the up and down movement of the sample 10. In the still condition where the ends of the detecting plate 13 are held by the tips of a holder 14, a fin 20 cuts off the light passage of a photocoupler 17, and a fin 21 is at the upper side of a photocoupler 18. In this case, when the sample table 6 is lifted, the sample 10 pushes up the detecting plate 13, and the fin 20 opens the light passage of the photocoupler 17. In such a way, the height of the sample 10 can be found from the rising amount of the detecting plate 13.
申请公布号 JPS62206756(A) 申请公布日期 1987.09.11
申请号 JP19860049036 申请日期 1986.03.06
申请人 FUJITSU LTD 发明人 ISHIZUKA TOSHIHIRO;ITO AKIO;GOTO YOSHIAKI;OKUBO KAZUO;OZAKI KAZUYUKI
分类号 H01J37/20;H01J37/28 主分类号 H01J37/20
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