| 摘要 |
PURPOSE:To simplify a charged-particle transporter while easily extending an exposure device additionally by mounting a tetrode electromagnet controlling so as to bring the state of charged particles at each period on a transport path, on which a plurality of deflecting electromagnets are fitted at periodic positions, to specific conditions. CONSTITUTION:Particles discharged from a charged-particle accelerator 1 are controlled so that dispersed functions in each deflecting electromagnet 5a-5c are brought to zero by tetrode electromagnets 4a, 4b, pass through a deflecting electromagnet 8, and are transported in a transporter 2, controlled so that the angles of lead of betatron functions at respective period are brought to multiples of 180 deg. by tetrode electromagnets 4c-4h. A course is altered by the deflecting electromagnets 5a, 5b as required and introduced to SOR devices 6a, 6b. Since the properties of charged particles in the deflecting electromagnets 5a, 5b are the same, the SOR devices 6a, 6b receive charged particles under quite the same conditions and generate stable emitted light, and the emitted light is used in exposure processor 7a, 7b. |
