| 摘要 |
PURPOSE:To thin, miniaturize and lighten the whole actuator by engaging a fine-adjustment positioning body to be moved with the crossed section of a plate type coil body. CONSTITUTION:In a two-dimensional actuator, respective paired magnetic circuit bodies 2-3 for X-Y axes are arranged oppositely onto the upper surface of a base 1, and each magnetic circuit body 2, 2a is faced mutually and has U-shaped yokes 21, 21a fixed to the base 1 and permanent magnets 22, 22a. The directions of flow of magnetic flux are vertically directed oppositely, making N and S poles differ in magnetic poles for both permanent magnets 22, 22a. A pair of plate type coil bodies 4, 5 are disposed orthogonally onto the base 1, and a body to be moved 6 is connected and arranged to the crossed section of the coil bodies 4, 5 while both end sections of respective coil body 4, 5 are positioned in magnetic gaps in the corresponding magnetic circuit bodies 2, 2a and supported to a spring member 7. Accordingly, when currents are flowed through the coil body 4, both magnetic circuit bodies 2, 2a generate force in the same direction to the coil body 4, thus shifting the body to be moved 6.
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