| 摘要 |
PURPOSE:To make light-emitting spaces in each discharge tube unit comparatively small in size, to improve luminous efficiency and to enhance light transmittance by thinning a light-transmitting window by constituting a light source of a large number of the comparatively small discharge tube units using a window material consisting of LiF or the like. CONSTITUTION:A discharge gas passing through holes formed to partitions among each discharge tube unit 9 is introduced to respective discharge tube unit 9 at constant pressure from a port 11, and each discharge tube unit 9 is supplied with power from a power supply 12 for discharge, thus discharging respective discharge tube unit 9, then generating vacuum ultraviolet beams. A desired reaction gas is admitted into a reaction chamber 1 through a port 4, and an inert gas is introduced into a light source chamber 7 along a partition wall 6 through a port 15. Light emitted from respective discharge tube unit 9 for a discharge tube 8 passes through separate light-transmitting window 10 and meshes 14 in a light-transmitting opening section 13 and is admitted into the reaction chamber 1, and CVD through which films are deposited on substrates 3 and etching can be conducted.
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