| 摘要 |
PURPOSE:To make the manual adjustment of a wind signal unnecessary, by measuring a pattern size and generating automatically a wind signal conforming to the size of a mask pattern. CONSTITUTION:The intervals of a binary MD signal, T1-T3, are measured by an interval measuring circuit 46, and the measured values are stored on a RAM50 via an I/O circuit 47. The pattern 81 of a mask is a pattern whose size is set as L1=L3=L, and a relation that T1=T3 is held, because the scanning speed of a laser beam is constant. Further assuming T1=T3=1, the value of T is compared with the value of a mask pattern prepared on the RAM50, and a wind signal data is selected wherein the values of T and mask pattern conform with each other. The wind signal data selected in this manner is delivered to a wind generating circuit 42 from the I/O circuit 47. Thereby a wind is automatically outputted. |
