发明名称 STORAGE DEVICE FOR WAFER CASSETTE
摘要 PURPOSE:To enable a cassette to be relocated from either of both sides of a device with no worsening of workability, by positioning a receiving bed always in the outside when the cassette is mounted. CONSTITUTION:A receiving fixture 10, which is pressed by an actuator of a pneumatic cylinder 14b and positioned in the outside, enables a cassette 6 to be mounted onto the receiving fixture 10 in a short time further easily. When a storage bed 5 peripherally moves by a chain 4 reaching an opposite side B, the receiving fixture 10, which is placed in the right side maintaining a condition in a side A, is extruded to the left side by actuating a pneumatic cylinder 14a. In this way, the cassette 6 can be mounted easily further in a short time from the side B because the receiving fixture 10 is positioned in the outside of the storage bed 5. In this way, the cassette 6 can be mounted easily further in a short time onto the receiving fixture 10 because it is extruded by the pneumatic cylinders 14a, 14b being position in the outside when the storage bed 5 is placed in the side A or the side B.
申请公布号 JPS62205907(A) 申请公布日期 1987.09.10
申请号 JP19860047306 申请日期 1986.03.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 FUKUDA NOBORU
分类号 B65G1/127;B65G1/00;B65G1/133 主分类号 B65G1/127
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