| 摘要 |
PURPOSE:To simplify the mechanism of an apparatus, by providing a pellet moving body and a pellet mounting body, and displacing a pellet aligning part under the state the aligning part is adjusted and moved together with the pellet mounting body. CONSTITUTION:A second X-Y table 21 is set and moved at an original position. An arm 26 is moved to the left end position. Then a pellet 19 on a pellet feeding part 20 is held with a moving nozzle 52. A pellet 19 on a pellet aligning part 45 held with a mounting nozzle 54. When the arm 26 is moved to the right end position and the mounting nozzle 54 is moved and adjusted to the specified pellet mounting position with a second X-Y table driving and controlling part 21A, the moving nozzle 52 is displaced under the state the nozzle 52 is moved as a unitary body, and at the same time, the pellet aligning part 45 is also displaced under the state the part 45 is moved together with the adjustment and the movement of the mounting nozzle 54. Therefore, the pellet moving nozzle 54 is set at an adequate pellet releasing position with respect to the pellet aligning part 45. The pellets 19 can be mounted to a plurality of the pellet mounting positions of a substrate 49.
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