发明名称 Device for detecting a centring error.
摘要 <p>A device for detecting a centring error of a rotationally symmetrical surface (01, 02) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centring error detection is described. Two beams (b1, b2; b3, b4) at angles of approximately 90 DEG are directed onto the object and the variation in the phase difference caused by the centring error ( epsilon ) between the two beams (b1 b2; b3, b4) reflected by the surface is determined.</p>
申请公布号 EP0235861(A1) 申请公布日期 1987.09.09
申请号 EP19870200309 申请日期 1987.02.25
申请人 N.V. PHILIPS' GLOEILAMPENFABRIEKEN 发明人 BOUWHUIS, GIJSBERTUS;BRAAT, JOSEPHUS JOHANNES MARIA
分类号 G02B27/28;G01B11/00;G01B11/26;G01B11/27;G01M11/02;G02B6/32;G02B7/00;G02B27/62;G03F9/00;G11B7/095;(IPC1-7):G01B11/26 主分类号 G02B27/28
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