发明名称 |
Device for detecting a centring error. |
摘要 |
<p>A device for detecting a centring error of a rotationally symmetrical surface (01, 02) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centring error detection is described. Two beams (b1, b2; b3, b4) at angles of approximately 90 DEG are directed onto the object and the variation in the phase difference caused by the centring error ( epsilon ) between the two beams (b1 b2; b3, b4) reflected by the surface is determined.</p> |
申请公布号 |
EP0235861(A1) |
申请公布日期 |
1987.09.09 |
申请号 |
EP19870200309 |
申请日期 |
1987.02.25 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
BOUWHUIS, GIJSBERTUS;BRAAT, JOSEPHUS JOHANNES MARIA |
分类号 |
G02B27/28;G01B11/00;G01B11/26;G01B11/27;G01M11/02;G02B6/32;G02B7/00;G02B27/62;G03F9/00;G11B7/095;(IPC1-7):G01B11/26 |
主分类号 |
G02B27/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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