| 摘要 |
PURPOSE:To reduce the stroke of a table to half of the scanning range of a light beam by providing a right-angled reflecting body having two reflecting surfaces which are open to a work surface, a light beam generating device for a light beam which is made incident on the reflecting body and converged on the work surface, and a mechanism which moves the right-angled reflecting body at right angles to its ridge and in parallel to the work surface. CONSTITUTION:When the right-angled reflecting body 1 is moved on the moving table 3 by distance L1, convergent laser light 9 is converged on the work surface 5 by the right-angled reflecting body 1' after movement shown by a dotted line. The quantity L2 of scanning of the laser light which is the gap between the convergence position of the reflected laser light 10 on the work surface 5 before the movement and the convergence position of the reflected laser light beam 11 on the work surface 5 after the movement is twice as large as the quantity L1 of movement of the right-angled reflecting body 1. Then, the reflected laser light 10 slants by an angle twice the inclination of the ridge 2 and impinges on the work surface 5 while shifting in the linear direction of the ridge 2 and its optical path length only varies; and the laser light in the moving direction 4 of the right-angled reflecting body 1 exerts influence upon neither operation on the scanning quantity nor operation on the optical path length on any fixation condition. |
