| 摘要 |
PURPOSE:To simplify a structure and to obtain extremely high detection sensitivity, by alternately laminating a plurality of metal membranes and a plurality of semiconductive membranes. CONSTITUTION:When X-ray photon flux is incident on the metal membrane 142 of the uppermost surface, a photoelectron formed by mutual action is incident on an a-Si membrane 123 to form an electron hole pair. X-ray photons losing energy partially by the mutual action on the membrane 142 penetrate through the membrane 123 to be incident on a metal membrane 132, Similarly, a photoelectron is formed by photoelectric absorption and incident on an a-Si membrane 13 to form an electron hole pair. A structure wherein three unit cells constituted as mentioned above are laminated is further laminated in large numbers to make it possible to absorb almost all of incident X-rays. By parallel taking out carriers formed in each membrane 12, the electric signal corresponding to incident X-rays is obtained.
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