| 摘要 |
PURPOSE:To enable simple and low-cost expansion of a high cleanliness space as occasion demands, by a method wherein a space above the high performance filter of a clean unit is connected to a space above the high performance filter of an additional unit through a connection port. CONSTITUTION:A space 47 above a high performance filter 38 of an additional unit 15 is communicated with a space 27 above a high performance filter 26 of a filter unit 12 through a connection port 24. Dampers 41, 41..., by means of which an airflow of air from a fan 28 is distributed to the clean unit 12 side and the additional unit 15 side, are removably mounted to a front wall 23. A production device 16 is contained in a high cleanliness space 18, and the opening of the damper 41 is regulated by means of a handle 42 so that a given airflow of air is fed to the clean unit 12 side and the additional unit 15 side. Thereafter, with a fan 28 started, clean air is sent to a position below the filters 26 and 38 toward the production device 16. This constitution enables simple expansion of a high cleanliness space. |
