| 摘要 |
PURPOSE:To enable the stable mass production of superior electrophotographic sensitive bodies each having a photosensitive layer free from detects such as unevenness and having fine appearance and quality by introducing a no film forming gas into a reac tion chamber from parts near the ends of a counter electrode and an earthed shield electrode simultaneously with the introduction of a film forming gas. CONSTITUTION:No film forming gas is introduced into a reaction chamber from parts near the ends of a counter electrode and an earthed shield electrode simultaneously with the introduction of a film forming gas, and voltage is applied between a substrate and the counter electrode to cause glow discharge. By the glow discharge, the film forming gas is decomposed to form a photosensitive layer on the substrate. Since the no film forming gas is introduced, a powdery or fine flaky reaction product is hardly produced at the ends of the electrodes, the deposition of the reaction product on the ends of the electrodes and the inner wall of the reaction chamber is reduced and the photosensitive layer formed on the substrate is hardly contaminated or dam aged by the reaction product. Accordingly, the appearance and quality of the resulting sensitive body are considerably improved and superior sensitive bodies can be stably mass-produced. |
