| 摘要 |
PURPOSE:To make dust occurrence and any damage to a substrate peripheral edge preventable, by making a substrate on a positioner so as to go up and separate from a belt for alignment after stopping the belt with a signal out of a stop sensor which detects a front edge of the substrate to be conveyed on the belt. CONSTITUTION:When a substrate 5 being conveyed out of a longitudinal direction A is reached up to a position 5A, a stop sensor 4 detects the substrate 5, stopping motion of a conveyor belt 2. Afterward, a stage 6 goes up, an upper surface of a positioner 3 reaches the substrate 5, and when further a belt surface and the substrate 5 are separated from each other as far as a distance DELTAa, the stage 6 comes to a stop, whereby the positioner 3 starts alignment of the substrate 5. Doing like this, the substrate being conveyed by the belt is separated from the belt and aligned, not by such a method that rubs the surface or makes it collide with a pin, so that any damage to the substrate and dust sticking are avoided and the required alignment is performable.
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