| 摘要 |
<p>PURPOSE:To correct the shear of a beam irradiating position due to yawing of a sample stage and to improve drawing accuracy by detecting the position of a sample stage at real time and deflecting a laser beam on the basis of the detected result. CONSTITUTION:When a sample 20 is scanned by laser beam in the X direction on the basis of the rotation of the polygon mirror and the blanking control of the beams is executed in accordance with pattern data to be drawn while continuously moving a sample stage 19 mounting the sample 20 in the Y direction, a required pattern can be drawn on the sample 20. In this case, the Y direction of the sample stage 19 is measured by an MSS27, a difference between the measuring position and a position to be originally set up is calculated in each scan of a beam and the setting position of a reflecting mirror 12b is varied by a PZ21 in accordance with the difference to correct the beam irradiating position in the Y direction. On the other hand, the shear of the sample stage 19 in the X direction is detected by a GS28 and the beam is deflected in the X direction by an AOD14 in accordance with the detecting value.</p> |
