| 摘要 |
PURPOSE:To quickly and exactly execute an inspection of a mark by registering a reference inclination angle against a prescribed reference line of a mark from mark image information of a non-defective body which becomes a reference, detecting an inclination angle of a mark of a body to be inspected, comparing the inclination angle and the reference angle, and deciding whether a mark position of the body to be inspected is good or not. CONSTITUTION:From binary image information which has emphasized a connecting pin of an IC, block of the connecting pin is detected, and from its block information, position information of the connecting pin is generated, and from this information, an array angle thetac of the connecting pin is derived. Also, an angle against a reference line of a mark area which has been derived from vertical and horizontal projections of a mark becomes a printing mark angle thetad. By deriving an angle thetac+thetad which has added the pin array angle thetac of the IC to be inspected and the printing mark angle thetad, and comparing it with a reference angle theta1 which has been stored in dictionary memories 54, 55, whether the mark of the IC to be inspected has been printed in a curved state or not is decided. |
