| 摘要 |
PURPOSE:To obtain an electrophotographic sensitive body free from film defects by exposing an electrically conductive substrate to plasma of a gaseous fluorocarbon-oxygen mixture and forming amorphous silicon films as the constituent layers of a sensitive body. CONSTITUTION:An electrically conductive substrate 1 is set in a vacuum vessel and glow discharge for forming films as the constituent layers of a sensitive body is started. At this time, dust is present on the substrate 1 and most of the dust is silicon and carbon compounds, so the substrate 1 is exposed to plasma generated by applying RF power to a gaseous fluorocarbon-oxygen mixture to remove the dust immediately before the films are formed on the substrate 1 by glow discharge. Thus, an amorphous silicon sensitive body free from film defects and capable of giving a high grade image free from image defects such as white spots and whitening can be produced. |
