发明名称 Improved micro-electronics devices and methods of manufacturing same.
摘要 <p>A low dielectric constant material for use in the formation of thick film circuits such as VLSI devices. The material comprises a thick film insulation matrix of standard viscosity; a thick film organic vehicle; and a plurality of dry, hollow, glass microspheres (26). The insulation matrix, vehicle, and microspheres (26) are thoroughly combined into a homogeneous material of standard viscosity. </p>
申请公布号 EP0234896(A2) 申请公布日期 1987.09.02
申请号 EP19870301527 申请日期 1987.02.23
申请人 DIGITAL EQUIPMENT CORPORATION 发明人 KELLERMAN, DAVID
分类号 C03C17/38;C03C14/00;C08K7/16;C08K7/20;C08L101/00;C09D5/25;H01B3/02;H01L21/48;H01L23/15;H01L23/498;H05K1/03;H05K3/28;H05K3/46;(IPC1-7):H01L23/14 主分类号 C03C17/38
代理机构 代理人
主权项
地址