Method of laser emission spectroscopical analysis and apparatus therefor

摘要

In a method of laser emission spectroscopical analysis, wherein a light emitted from the surface of a sample when a laser beam is irradiated onto the surface of the sample is spectroscopically analyzed, an emission mode of the laser beam is fixed to a gauss distribution type TEM00 mode to avoid variations in an intensity distribution due to a change in mode, and an analyzed value is obtained from an intensity of a spectral line of an element to be measured when an intensity of a preset spectral line or an intensity ratio between a pair of preset spectral lines is within a predetermined range, so that the influence of wide fluctuations in an evaporation and an excitation processes occurring on the surface of the sample can be eliminated, thereby improving the accuracy of analysis.