发明名称 |
Antireflection coatings for silicon solar cells |
摘要 |
An improved optical match to a subsequently-formed antireflection overcoating is achieved by providing a silicon solar cell substrate with an altered surface layer that is formed by an ion-beam process, and has a refractive index between about 3.4 and about 3.6 at 633 nm and between about 3.6 and about 3.8 at 442 nm. The surface layer is formed by adding between about 2% and about 10% methane, by volume, to the hydrogen flow in a Kaufman type broad beam ion source.
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申请公布号 |
US4691077(A) |
申请公布日期 |
1987.09.01 |
申请号 |
US19850733712 |
申请日期 |
1985.05.13 |
申请人 |
MOBIL SOLAR ENERGY CORPORATION |
发明人 |
GREGORY, JAMES A.;HANOKA, JACK I.;VAYMAN, ZINOVY Y. |
分类号 |
H01L31/0216;H01L31/0224;H01L31/18;(IPC1-7):H01L31/06 |
主分类号 |
H01L31/0216 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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