| 摘要 |
PURPOSE:To realize a long service life and a high property, by burying a mesh- form filament to which a current is applied for heating, inside the wall of a crucible. CONSTITUTION:A mesh-form filament 5 to which a current is applied for heating is coated with an alumina material 6 to form a crucible 3. At the center hole of the crucible 3, a needle-form chip 1, made of or coated with a reaction- resisting substance, is inserted, and the needle-form chip 1 is held by a crucible lid 4. Since the unnecessary evaporation of the ionized metal 2 is prevented by the crucible lid 4, the service life of the ion source is long.
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