发明名称 DOUBLE-STRUCTURE VESSEL
摘要 PURPOSE:To obtain the title double-structure vessel wherein the difference in pressure between the outside and the inside of the inside vessel can be easily measured by providing a through-hole, a pressure receiving member, a beam connected to the member, a sensor for detecting the strain of the beam, etc., to the inside vessel of the vessel of specified structure. CONSTITUTION:An inert gas is filled between the inside vessel 12 of the double- structure vessel 3 filled with a high-dissociation pressure component gas and the outside vessel 11, a through-hole 32 is provided to the upper plate body 31 of the vessel 12, an inner peripheral protruding part 33 and the outer peripheral protruding part 34 are furnished to the body 31, and an annular recess 35 is formed between the parts. Then a sealing liq. 36 (e.g., boron dioxide) is stored in the recess 35 and a bottomed cylinder 37a is immersed in the liq. The cylinder is vertically moved by the pressure difference between the inside and the outside of the inside vessel 12, and a horizontally fixed beam 39 is bent by the part protruding from the outside vessel 11 through a connecting member 37b as a pressure receiving member 37. The deflection of the beam 39 is detected by a strain sensor 40, and the pressure difference between the inside and the outside of the inside vessel 12 is calculated from the strain amt.
申请公布号 JPS62197391(A) 申请公布日期 1987.09.01
申请号 JP19860039897 申请日期 1986.02.25
申请人 MITSUBISHI METAL CORP 发明人 KAJIWARA JIRO
分类号 C30B15/00;H01L21/18;H01L21/208 主分类号 C30B15/00
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