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发明名称
FOERFARANDE FOER FRAMSTAELLNING AV INTEGRERADE KRETSAR.
摘要
申请公布号
FI873795(A0)
申请公布日期
1987.09.01
申请号
FI19870003795
申请日期
1987.09.01
申请人
ARROWHEAD INDUSTRIAL WATER, INC.;MONSANTO COMPANY
发明人
TREMONT, PETER L.;ACKERMANN, ARTHUR J.
分类号
H01L21/02;H01L21/306;H01L21/311;H01L21/316;H01L21/321;H01L21/762;(IPC1-7):H01L/
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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