| 摘要 |
PURPOSE:To move an ion generating section including an exciting coil section for a heavy material easily and safely by vertically shifting only a spacer member without vertically transferring the exciting coil section for the heavy material and separating the spacer member from a milling-chamber connecting section. CONSTITUTION:A planer-type rail frame 11 is installed, crossing a milling chamber 8. An ion generating section including an ion exciting coil 2 is loaded on the frame 11. The ion generating section is moved transversely in the rear direction capable of being completely retreated from the central position of a connecting section 14 for the milling chamber 8. A spacer member 13 which can connect in a vacuum airtight manner or separate the ion generating section and the connecting section 14 is mounted. Accordingly, the ion generating section is easily shifted safely along the rail frame 11.
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