| 摘要 |
PURPOSE:To prevent a power source or an ion source from being damaged due to over-resisting tension, by detecting each power output, and by interrupting a power source or varying the setting of output when the difference voltage exceeds a reference set-value. CONSTITUTION:The output of inverters 4, 5 is generated via step-up transformers 6, 7 rectifiers 8, 9, and condensers 10, 11. The intermediate voltage of output resistances 15, 16 and the intermediate voltage of output resistances 19, 20 are directed to an error amplifier 27 for input via amplifiers 25, 26. When the output of the error amplifier 27 exceeds a reference set-value, then a transistor 29 is turned ON, and a relay 30 is excited. By controlling an electromagnetic switch 2 with the contact output of the relay 30, an input power source is turned OFF.
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