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发明名称
SEMICONDUCTOR TESTING DEVICE
摘要
申请公布号
JPS62195572(A)
申请公布日期
1987.08.28
申请号
JP19860037745
申请日期
1986.02.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAENO HIDESHI;TADA TETSUO
分类号
G01R31/319;G01R31/3181;G06F7/58;G06F11/10
主分类号
G01R31/319
代理机构
代理人
主权项
地址
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