| 摘要 |
PURPOSE:To prevent a wafer-housing jig from being broken or so, by including a centroid-correcting means between a longitudinal boat and a rotating axis and making composition in which the centroid of the centroid-correcting means is situated at the opposite side of the centroid of the longitudinal boat with the mounting position of the rotating axis in between. CONSTITUTION:Formation position of respective coupling members 21, 22, and 23 is set so that the centroid Gr of the coupling members 21, 22, and 23 is situated beyond a line, which connects the centroid G1 of the longitudinal boat 2 to its center C1, and on an imagined line at the opposite side. On the contrary, because the center, that is, the centroid of a circular supporting plate is situated on the mounting position of a rotating axis 12, the centroid G2 of a coupling unit 20, which comprises the coupling members 21, 22, and 23 and the circular supporting plate 26, becomes situated on a line which connects the centroid G1 of the longitudinal boat 2 to its center C1. Resultantly, the centroid position of the housing jig which comprises the longitudinal boat 2, formed on the circular supporting plate 26, and the coupling unit 20 is moved from the centroid G1 to the center C1, correcting unbalanced weight of the longitudinal boat 2 by the coupling unit 20 and making the centroid position of the housing jig nearly coincide with the center C of the semiconductor wafer 1.
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