| 摘要 |
The invention relates to a measuring device for measuring devices (3) under test, in particular their surfaces (2) by means of a probe (4) for scanning the surface contour (2). The probe (4) is mounted on a guide and feed device (7, 15). In order to be able to supply measurement results which are as accurate as possible irrespective of the mechanical manufacturing tolerances and the mechanical play, in accordance with the invention it is proposed to provide an optotransmitter, e.g. a laser (8), which radiates in the direction of the probe (4), and makes a reference mark available on said probe. For this purpose, at least one optoelectronic detector (10) whose output signal is a measure for the reference mark is provided on the probe (4). <IMAGE>
|
