发明名称 Semiconductor laser
摘要 A semiconductor laser which can be highly modulated and a method for its production are specified. The semiconductor laser has a substrate (1), a semiconductor layer stack (4) and electrical contacts (6, 7). In order to reduce the capacitance, the width of the semiconductor layer stack (4) on the side surfaces (10) is reduced by anisotropic etching. The electrical contacts (6, 7) are located on the same side of the substrate (1) and are applied in the same process step. The semiconductor laser is suitable for monolithic integration with other components. <IMAGE>
申请公布号 DE3605925(A1) 申请公布日期 1987.08.27
申请号 DE19863605925 申请日期 1986.02.25
申请人 STANDARD ELEKTRIK LORENZ AG 发明人 WUENSTEL,KLAUS,DR.RER.NAT.;GOHLA,BERNWARD,DIPL.-ING.;TEGUDE,FRANZ-JOSEF,DR.RER.NAT.;LUZ,GERHARD,DIPL.-PHYS.;HILDEBRAND,OLAF,DR.RER.NAT.
分类号 H01S5/042;H01S5/227;(IPC1-7):H01S3/05;H01S3/096;H01S3/19 主分类号 H01S5/042
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