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发明名称
Method for manufacturing a metal insulator semiconductor field effect transistor.
摘要
申请公布号
EP0233823(A2)
申请公布日期
1987.08.26
申请号
EP19870400346
申请日期
1987.02.17
申请人
FUJITSU LIMITED
发明人
TAKAO, MIURA
分类号
H01L21/266;H01L21/3105;H01L21/336;H01L29/08;H01L29/78;(IPC1-7):H01L21/00
主分类号
H01L21/266
代理机构
代理人
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