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发明名称
PROCESS FOR MAKING AN IMPROVED DYNAMIC MEMORY CELL STRUCTURE
摘要
申请公布号
EP0167024(A3)
申请公布日期
1987.08.26
申请号
EP19850107133
申请日期
1985.06.11
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ISHAQ, MOUSA HANNA;NOBLE, WENDELL PHILLIPS, JR.
分类号
H01L27/10;H01L21/265;H01L21/3213;H01L21/8242;H01L27/108;(IPC1-7):H01L21/31;H01L21/82
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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