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发明名称
POSITION DETECTION
摘要
申请公布号
GB2147411(B)
申请公布日期
1987.08.26
申请号
GB19840021876
申请日期
1984.08.30
申请人
* CANON KABUSHIKI KAISHA
发明人
AKIYOSHI * SUZUKI;HIDEKI * INA
分类号
G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G01B11/14
主分类号
G03F9/00
代理机构
代理人
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