| 发明名称 |
A METHOD OF MAKING A COMPONENT FOR A MICROELECTRONIC CIRCUIT AND A SEMICONDUCTOR DEVICE AND AN OPTICAL WAVEGUIDE MADE BY THAT METHOD |
| 摘要 |
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| 申请公布号 |
EP0171226(A3) |
申请公布日期 |
1987.08.26 |
| 申请号 |
EP19850305242 |
申请日期 |
1985.07.23 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HOVEL, HAROLD JOHN;KUECH, THOMAS FRANCIS |
| 分类号 |
H01L21/28;G02B6/13;H01L21/033;H01L21/302;H01L21/3065;H01L21/308;H01L21/311;H01L21/316;H01L21/321;H01L21/338;H01L29/812;H01S5/00;H01S5/02;(IPC1-7):H01L21/31 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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