| 摘要 |
<p>PURPOSE:To easily make ceramic coating of high quality on a cylindrical inside surface by irradiating a spectrally divided laser beam to the pyramidal end face of a rotating ceramic member inserted into a cylindrical work moving in an axial direction. CONSTITUTION:The cylindrical work 7 is set in a vacuum vessel 5 in such a manner that said work can be axially moved by a gear 22 engaged with a tooth part 21a at the end face of a table 21 supporting the work when said gear is rotated by a motor 23. The ceramic member 13 of which the end is formed to the pyramidal end face is inserted into such work 7 and is rotated in an arrow (n) direction by a motor 20. The laser beam 2 from a laser oscillator 1 is spectrally divided by a wedge-shaped spectral mirror 17, an annular condenser mirror 18 and a window lens 6 and is irradiated to the pyramidal end face 13a. The ceramics is heated by the irradiated laser beam 2 and the formed evaporating particles 14 are made to collide perpendicularly against the inside peripheral face 7a of the work 7 by which the ceramic coating having the good adhesiveness is uniformly formed over the entire surface thereof.</p> |
