发明名称 OPTICAL TYPE IMAGE FORMER AND MASK PATTERN IMAGE FORMER
摘要 An optical imaging arrangement is described which comprises an opto-electronic focussing-error detection system (1, 2, 3, 4, 5, 6, 12, 13, 14, 18, 19, 20, 21) for determining a deviation between the image plane (PL) of the imaging system (L) and a second plane (PS) in which the image is to be formed. The image plane (PF) of the focussing-error detection system is adjustable, for example by means of a pivotable plane-parallel plate (15), so that the zero point of the focussing-error signal (Sf) is adjustable.
申请公布号 JPS62191812(A) 申请公布日期 1987.08.22
申请号 JP19870021904 申请日期 1987.02.03
申请人 PHILIPS GLOEILAMPENFAB:NV 发明人 YAN EFUERUTO FUAN DERU UERUFU;YOHANESU UIRUHERUMUSU MARIA BIISUTERUBOSU
分类号 G02B7/28;G02B7/32;G03B27/34;G03F7/207;G03F9/00;H01L21/027 主分类号 G02B7/28
代理机构 代理人
主权项
地址