| 摘要 |
PURPOSE:To obtain an apparatus capable of confirming the position of parts at a high speed, by providing a fixed image pickup means for picking up the image of the predetermined corner of the parts and a movable image pickup means for picking up the image of the corner other than the predetermined corner. CONSTITUTION:An objective lens 10 constitutes a fixed image pickup means and an objective lens 17 constitutes a movable image pickup means and an x-shaft 24 is provided to a y-axis motor 26. Therefore, if the motor 26 moves on a y-shaft 25, the x-shaft 24 moves to the y-shaft direction. An x-axis motor 27 is provided on the x-shaft 24 and the movable image pickup means is provided on the mount stand 28 of the motor 27. The driving of the motor 26 is controlled by a y-axis servo mechanism 29 and that of the motor 27 is controlled by an x-axis servo mechanism 30. A preset controller 31 preliminarily stores the position of the movable image pickup means corresponding to the sizes of chip parts, for example, parts 32, 33, that is, positional informations of the positions P1, P2 of the parts 32, 33 and receives the indication Q of the kind of the chip parts from a central processing unit 34 to send out the position control informations of the mechanisms 29, 30.
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